A versatile universal testing machine (model Kappa 50 SS-CF, manufacturer: M/s
ZwickRoell Testing Systems GmbH, Austria) capable of carrying out a variety of
mechanical tests (tension, compression, 3-point bend, tensile and compressive creep,
creep crack growth, stress rupture, stress and strain controlled fatigue, creep-fatigue
interaction at both ambient and elevated temperatures up to 1500 o C in air, vacuum or
inert atmosphere. The types of materials which can be tested include metals and
alloys, ceramics, polymers, composites and functionally graded materials.
The Alpha-Step D-600 stylus profiler by KLA is capable of measuring 2D and 3D step
heights ranging from a few nanometers to 1200 µm
(i) Step Height Measurement:
o The instrument accurately measures step heights, allowing you to quantify material
added or removed during processes such as etching, sputtering, SIMS, deposition, spin
coatings, CMP, and more.
o It covers a wide range of step heights, making it suitable for various applications.
(ii) Texture Measurement:
o The Alpha-Step D-600 assesses 2D and 3D texture, providing information about sample
roughness and waviness.
o This feature helps characterize surface quality and topography.
(iii) Form Measurement:
o It quantifies wafer bow and determines the height and radius of curvature of structures
(e.g., lenses).
o Useful for understanding the shape and form of samples.
(iv) Stress Measurement:
o The instrument accurately measures sample bow using a stress chuck to support the
sample in a neutral position.
o Stress analysis is essential for various applications, including semiconductor
manufacturing and materials research.
The Alpha-Step D-600’s direct stylus measurement is independent of material properties, making it
suitable for a wide variety of structures and materials
However, there are certain sample types that may not be suitable for measurement using this profiler:
(i) Soft or Delicate Samples:
o The D-600 is designed to measure soft or delicate samples without causing damage.
o However, extremely fragile materials may still be challenging to measure accurately.
(ii) Materials with Curvature Smaller Than Stylus Width:
o If a sample has features with a radius of curvature smaller than the width of the stylus
tip, distortion in measured feature width may occur.
o While the height measurement remains accurate, the lateral dimensions may be
affected.
(iii) Highly Transparent Materials:
o The D-600’s stylus measurement technique is independent of material properties, but
highly transparent materials (such as certain polymers or glass) may pose challenges
due to light scattering or refraction.
(iv) Samples with Excessive Roughness or Surface Irregularities:
o While it can measure roughness, excessively rough surfaces may lead to stylus tip wear
or inaccurate results.
o Extremely irregular surfaces may also affect the stylus movement.
(v) Samples with Extreme Chemical Reactivity:
o Although the instrument is versatile, samples with extreme chemical reactivity (e.g.,
highly corrosive materials) should be handled with caution.
The instrument allows for a sample size up to 200mm in diameter and a maximum height of 30 mm.
1. External/Internal and Industrial users are required to prominently acknowledge the technical support/publication/financial aid arising from the facility in all publications/media releases and in the introductory paragraphs of annual reports while and after using the SATHI-IIT Kharagpur facility.
2. Do the registration with the link provided on the website prior to any payment.
3. Before sending keep every sample and reagent vial labeled properly with date. Unlabeled samples/reagents would be discarded.
4. In case of any technical query, please enquire/contact only coosathi@iitkgp.ac.in
1. Do not make the payment before final confirmation of your bookings.
2. Users are not allowed to enter lab or touch any equipment, chemicals or other materials in the laboratory area until you are instructed by lab in-charge.
3. Do not wander around the instrument facility, distract others or interfere with the laboratory experiments.
4. Any edibles, drinkables, and smoking are strictly prohibited.
5. Do not use the phone or laptop inside laboratory.
6. Do not use a flash drive on lab computers. For the data of your samples will be shared through mail or google drive.
7. Unauthorized experiments/samples are not allowed in the laboratory.
8. Users are not allowed to work in laboratory/facility premises alone or without permission of the COO, SATHI-IIT Kharagpur.
